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Measurement Science and Technology &
Scanning Probe Microscopy

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Surface imaging


Surface potential


Phase imaging

Advanced KPFM on p-epi-layers on p-Si




KPFM contrast as color information projected on the topography as height information
of a cross-section of P-doped Si-Wafer with B-doped Si-Epilayers
Image size: 20 µm x 20 µm x 186 nm
Sample of courtesy by: H. Schmid (FZ Rossendorf), A. Möller (SGS Fresenius), Dresden.