Anfatec Instruments AGMeasurement Science and Technology &Copyright / Impressum
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Surface imaging
Surface potential
Phase imaging |
Advanced KPFM on p-epi-layers on p-SiKPFM contrast as color information projected on the topography as height information of a cross-section of P-doped Si-Wafer with B-doped Si-Epilayers Image size: 20 µm x 20 µm x 186 nm Sample of courtesy by: H. Schmid (FZ Rossendorf), A. Möller (SGS Fresenius), Dresden. |