Anfatec Instruments AGMeasurement Science and Technology &Copyright / Impressum
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Surface imaging
Surface potential
Phase imaging |
Advanced KPFM on p-epi-layers on n-SiKPFM contrast as color information projected on the topography as height information of a cross-section of B-doped Si-Wafer with P- and B-doped Si-Layers Image size: 20 µm x 20 µm x 178 nm Sample of courtesy by: H. Schmid (FZ Rossendorf), A. Möller (SGS Fresenius), Dresden. |