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Measurement Science and Technology &
Scanning Probe Microscopy

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Surface imaging


Surface potential


Phase imaging

Advanced KPFM on p-epi-layers on n-Si




KPFM contrast as color information projected on the topography as height information
of a cross-section of B-doped Si-Wafer with P- and B-doped Si-Layers
Image size: 20 µm x 20 µm x 178 nm
Sample of courtesy by: H. Schmid (FZ Rossendorf), A. Möller (SGS Fresenius), Dresden.