Anfatec Instruments AG

Measurement Science and Technology &
Scanning Probe Microscopy

Surface imaging

• 20nm Cluster
• Stepped Si(111) surface
• Chemically treated Si(111) surface
• UMG03/Pt grating
• Electron lithography pattern in Si
• Polished steel surface
• Polished steel surface 2
• Porous alumina
• Polymer grating
• Semiconductive clusters on Si
• Gold surface

Surface potential

• Work function on Au/Pt test sample
• Work function on Au/Pt sample
• Au/Pt test grating
• Advanced KPFM on p-epi-layers on n-Si
• Advanced KPFM on p-epi-layers on p-Si
• Christmas tree

Phase imaging

• Gold surface with organic contamination
• Gold on silicon
• Polymer film with embedded gold clusters

Au/Pt test grating

Topography		Surface Potential
Image size: 10 µm x 10 µm Height scale: 64 nm		Image size: 10 µm x 10 µm Potential range: 123 mV … 400 mV