Anfatec Instruments AG

Measurement Science and Technology &
Scanning Probe Microscopy

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Calibration Grating UMG01

Typical applications 

  • height calibration 

  • lateral calibration of smaller scan ranges

This grating was designed for the height calibration of scanners, whose scan range is too small to work with the typical grating. The chess pattern in the center of the grating allows overview calibration in x, y and z.

large image


  • material

  • typical height

  • depth calibration 

  • center of the grating

    • Pitch*

    • size

  • edge of the grating

    • Pitch x

    • Pitch y

    • active area

20 nm +/- 2 nm 
by measuring the thickness of the oxide before manufacturing

2 µm x 2 µm (chess pattern 1 um x 1 um) 
0,4 mm x 0,4 mm 

2 µm Si/ 2 µm SiO (pitch: 4 µm
2 µm Si/ 100 µm SiO 
2,4 mm x 2,4 mm