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Home > MikroMasch Products > Gratings> UMG01
Calibration Grating UMG01
Typical applications
This grating was designed for the height calibration of scanners, whose scan range is too small to work with the typical grating. The chess pattern in the center of the grating allows overview calibration in x, y and z. |
Description
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Si-substrate/SiO-Layer 2 µm x 2 µm
(chess pattern 1 um x 1 um) 2 µm Si/ 2 µm
SiO (pitch: 4 µm) |