Anfatec Instruments AG

Measurement Science and Technology &
Scanning Probe Microscopy

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Calibration Gratings for SPM Applications

Overview X-Y-Z-calibration

Type	Pitch / Description	Picture	Price
UMG01	2 µm pitch chess pattern/ 4 µm pitch line pattern/ 21 nm height		110,- €
UMG02	2 µm pitch chess pattern/ 4 µm pitch line pattern/ 52 nm height		110,- €
UMG03Pt	2 µm pitch chess pattern/ 4 µm pitch line pattern/ 58 nm height PtSi-coated		110,- €
TGX01P TGX11P	3 µm pitch chess pattern 130 nm depth 10 µm pitch chess pattern 130 nm depth		200,- €

Height Calibration

Type	Pitch / Description	Picture	Price
UMG01 UMG02 UMG03Pt	Height: 21 nm 52 nm 58 nm Chess/Line grating, 2/4 µm pitch producer: Anfatec		110,- €
TGZ01 TGZ02 TGZ03 TGZ04 TGZ11	Height: 20 nm 98 nm 496 nm 1000 nm 1350 nm Line grating, 3 µm pitch producer: MikroMasch		100,- €
TGZ1 TGZ2 TGZ3	Height: 19 nm 104 nm 540 nm Line grating, 3 µm pitch producer: NT-MDT		100,- €

Lateral Calibration

Type	Pitch / Description	Picture	Price
TGX01 TGX01P	3 µm pitch chess pattern 130 nm depth producer: Mikromasch		200,- €
TGX11 TGX11P	10 µm pitch chess pattern 130 nm depth producer: Mikromasch		200,- €
TGX1	3 µm pitch chess pattern 130 nm depth producer: NT-MDT		200,- €
TGQ1	3 µm pitch chess pattern 19.5 nm depth producer: NT-MDT		300,- €
TDG01 TDG1Au	278 pitch line pattern > 55 nm depth producer: NT-MDT		200,- €

Linearity Calibration / Tip calibration

Type	Pitch / Description	Picture	Price
TGG1	3 µm pitch / 70 ° angle line pattern, 1.5 µm height producer: NT-MDT		200,- €
TGG01	3 µm pitch / 70 ° angle line pattern, 1.5 µm height producer: MikroMasch		200,- €
TGF11	10 µm pitch / 54.44 ° angle line pattern, 1.8 µm height producer: MikroMasch		200,- €
TGT1	2.12 µm tip to tip distance producer: NT-MDT		200,- €
PA01	tip characterizer porous Aluminium producer: MikroMasch		200,- €